Horizontal Low Pressure Boron Diffusion Equipment

  Features   

·Matured BBr3 liquid source & BCL3 gas source control and delivery technology;

·Patented technology;

·Unique double-layer-nested furnace door structure;

·High-speed and stable integral module boat pushing mechanism;

·Intelligent automatic control;

·MES software with independent intellectual property rights;

·Matching S.C smart production management system.